Design and performance of a test rig for evaluation of nanopositioning stages
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F19%3AN0000114" target="_blank" >RIV/00177016:_____/19:N0000114 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26620/19:PU134569
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1361-6501/aafd03" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/aafd03</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6501/aafd03" target="_blank" >10.1088/1361-6501/aafd03</a>
Alternative languages
Result language
angličtina
Original language name
Design and performance of a test rig for evaluation of nanopositioning stages
Original language description
Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science and Technology
ISSN
09570233
e-ISSN
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Volume of the periodical
30
Issue of the periodical within the volume
3
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
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UT code for WoS article
000458209200002
EID of the result in the Scopus database
2-s2.0-85062464303