Algorithms for using silicon steps for scanning probe microscope evaluation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F20%3AN0000045" target="_blank" >RIV/00177016:_____/20:N0000045 - isvavai.cz</a>
Alternative codes found
RIV/00216224:14740/20:00118376 RIV/00216305:26620/20:PU139266
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1681-7575/ab9ad3" target="_blank" >https://iopscience.iop.org/article/10.1088/1681-7575/ab9ad3</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1681-7575/ab9ad3" target="_blank" >10.1088/1681-7575/ab9ad3</a>

Result language
angličtina
Original language name
Algorithms for using silicon steps for scanning probe microscope evaluation
Original language description
The 2019 update to theMise en Pratique for the metre adopted the lattice parameter of silicon as a secondary realisation of the metre for dimensional nanometrology. One route for this realisation is the use of amphitheatre like monoatomic steps of silicon. In response, in this paper we present new algorithms for one- and two-dimensional analysis of atomic force microscope images of these large area atomic terraces on the surface of silicon. These algorithms can be used to determine the spacing between the steps and identify errors in AFM scanning systems. Since the vertical separation of the steps is of the same order of magnitude as many errors associated with AFMs great care is needed in processing AFM measurements of the steps. However, using the algorithms presented in this paper, corrections may be made for AFM scanner bow and waviness as well as taking into account the edge effects on the silicon steps. Applicability of the data processing methods is demonstrated on data sets obtained from various instruments. Aspects of steps arrangement on surface and its impact on uncertainties are discussed as well.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
21100 - Other engineering and technologies

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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