Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F00%3A00002241" target="_blank" >RIV/00216224:14310/00:00002241 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films
Original language description
In this paper AFM measurements of the statistical quantities of randomly rough surfaces important in optics are presented. The procedures enabling us to determine the values of the RMS value of the heights, RMS value of the slopes, autocorrelation function of the heights, power spectral density function, one-dimensional distribution of the probability density of the heights and one-dimensional distribution of the probability density of the slopes of the irregularities of roughness of these surfaces onbasis of the AFM data are described. An illustration of these procedures is performed using the results achieved for randomly rough surfaces of silicon. A comparison of these AFM results with those obtained for the same samples by the optical method i s also introduced in this paper.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2000
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 4th Seminar on Quantitative Microscopy
ISBN
3-89701-503-X
ISSN
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e-ISSN
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Number of pages
8
Pages from-to
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Publisher name
Physikalisch-Technische Bundesanstalt
Place of publication
Braunschweig
Event location
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Event date
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Type of event by nationality
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UT code for WoS article
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