Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F18%3A39913128" target="_blank" >RIV/00216275:25310/18:39913128 - isvavai.cz</a>

Alternative codes found

RIV/00216224:14310/18:00104690

Result on the web

<a href="https://onlinelibrary.wiley.com/doi/full/10.1002/sia.6463" target="_blank" >https://onlinelibrary.wiley.com/doi/full/10.1002/sia.6463</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/sia.6463" target="_blank" >10.1002/sia.6463</a>

Result language

angličtina

Original language name

Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

Original language description

Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

<a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

—

Volume of the periodical

50

Issue of the periodical within the volume

11

Country of publishing house

GB - UNITED KINGDOM

Number of pages

4

Pages from-to

1230-1233

UT code for WoS article

000448889600046

EID of the result in the Scopus database

2-s2.0-85055424591