Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00073316" target="_blank" >RIV/00216224:14310/14:00073316 - isvavai.cz</a>
Result on the web
<a href="http://ac.els-cdn.com/S0040609014002533/1-s2.0-S0040609014002533-main.pdf?_tid=1164e0f6-cca0-11e4-ac1b-00000aab0f01&acdnat=1426595038_4b3a79a484100725154217605bb36278" target="_blank" >http://ac.els-cdn.com/S0040609014002533/1-s2.0-S0040609014002533-main.pdf?_tid=1164e0f6-cca0-11e4-ac1b-00000aab0f01&acdnat=1426595038_4b3a79a484100725154217605bb36278</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2014.02.092" target="_blank" >10.1016/j.tsf.2014.02.092</a>

Result language
angličtina
Original language name
Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces
Original language description
Expressions for ellipsometric quantities and reflectance presented are based on a heuristic combination of the Rayleigh-Rice theory and the scalar diffraction theory. The latter takes into account the local slopes and shadowing. The second-order Rayleigh-Rice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of thequadruple integral resulting from this combination of the two theories is developed, utilising a Gauss-like quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created usinganodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. (C) 2014 Elsevier B.V. All rights reserved.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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