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Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F20%3AN0000077" target="_blank" >RIV/00177016:_____/20:N0000077 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216224:14310/20:00114378

  • Result on the web

    <a href="https://www.confer.cz/nanocon/2019/114-study-of-nanostructured-plasma-polymer-thin-films-growth-under-dusty-plasma-conditions" target="_blank" >https://www.confer.cz/nanocon/2019/114-study-of-nanostructured-plasma-polymer-thin-films-growth-under-dusty-plasma-conditions</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.37904/nanocon.2019.8699" target="_blank" >10.37904/nanocon.2019.8699</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions

  • Original language description

    In the present work plasma-polymer nanocomposite thin films were prepared under dusty plasma conditions in capacitively coupled RF discharges. The main focus was on the study of the formation of the organosilicon plasma polymers and their growth. The plasma polymers were grown heterogeneously in form of polymeric particles arising from the discharge volume which incorporated into the amorphous organosilicon polymeric film growing on the silicon and glass substrates. The created nanocomposite structure had very beneficial influence on the film properties. The films showed very interesting mechanical and surface properties. Variation in deposition conditions enabled us to vary the surface free energy of the films. The mechanical properties of the films were studied using nanoindentation technique and the surface structure was studied using atomic force microscopy. The atomic composition and chemical structure of the films were studied studied using XPS and FTIR techniques. The surface free energy of the films was studied using contact angle measuring techniques.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Conference Proceedings - NANOCON 2019

  • ISBN

    978-80-87294-95-6

  • ISSN

    2694-930X

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    642-647

  • Publisher name

    Tanger

  • Place of publication

    Ostrava

  • Event location

    Brno, hotel Voroněž

  • Event date

    Oct 16, 2019

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article