Three-dimensional drift correction of scan data from atomic force microscopy using Lissajous scanning paths
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F21%3AN0000015" target="_blank" >RIV/00177016:_____/21:N0000015 - isvavai.cz</a>
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1361-6501/ac100f" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/ac100f</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6501/ac100f" target="_blank" >10.1088/1361-6501/ac100f</a>
Alternative languages
Result language
angličtina
Original language name
Three-dimensional drift correction of scan data from atomic force microscopy using Lissajous scanning paths
Original language description
Non-raster scanning is being widely used to increase the scanning speed of atomic force microscopes (AFMs). However, like any other AFM scanning techniques, non-raster scanning can also suffer from drift during the scanning process. This paper presents a simple novel method based on cross-correlation for the effective drift correction of non-raster Lissajous AFM scans with intersecting paths. The drift in x, y and z axes can be determined using the crossing points and repeated scans of the same features. In this paper, the general method is presented together with experimental results using Lissajous scans of two artifacts, which demonstrate that the drift in the three axes and the additional tilt can all be corrected resulting in significant improvement in the image obtained. Our drift correction method can overcome the limitations of the existing AFM drift correction methods which are usually based on extra scanning, and it exploits the crossing scan paths and four scanning cycles inherent in Lissajous scanning without using additional scans to effectively determine the three-dimensional drift using cross-correlation and least squares techniques. The drift correction method can be used with any AFMs capable of Lissajous scanning.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
21100 - Other engineering and technologies
Result continuities
Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science and Technology
ISSN
1361-6501
e-ISSN
0957-0233
Volume of the periodical
32
Issue of the periodical within the volume
11
Country of publishing house
GB - UNITED KINGDOM
Number of pages
12
Pages from-to
—
UT code for WoS article
000680671700001
EID of the result in the Scopus database
2-s2.0-85112750437