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Three-dimensional drift correction of scan data from atomic force microscopy using Lissajous scanning paths

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F21%3AN0000015" target="_blank" >RIV/00177016:_____/21:N0000015 - isvavai.cz</a>

  • Result on the web

    <a href="https://iopscience.iop.org/article/10.1088/1361-6501/ac100f" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/ac100f</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1088/1361-6501/ac100f" target="_blank" >10.1088/1361-6501/ac100f</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Three-dimensional drift correction of scan data from atomic force microscopy using Lissajous scanning paths

  • Original language description

    Non-raster scanning is being widely used to increase the scanning speed of atomic force microscopes (AFMs). However, like any other AFM scanning techniques, non-raster scanning can also suffer from drift during the scanning process. This paper presents a simple novel method based on cross-correlation for the effective drift correction of non-raster Lissajous AFM scans with intersecting paths. The drift in x, y and z axes can be determined using the crossing points and repeated scans of the same features. In this paper, the general method is presented together with experimental results using Lissajous scans of two artifacts, which demonstrate that the drift in the three axes and the additional tilt can all be corrected resulting in significant improvement in the image obtained. Our drift correction method can overcome the limitations of the existing AFM drift correction methods which are usually based on extra scanning, and it exploits the crossing scan paths and four scanning cycles inherent in Lissajous scanning without using additional scans to effectively determine the three-dimensional drift using cross-correlation and least squares techniques. The drift correction method can be used with any AFMs capable of Lissajous scanning.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    21100 - Other engineering and technologies

Result continuities

  • Project

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2021

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Measurement Science and Technology

  • ISSN

    1361-6501

  • e-ISSN

    0957-0233

  • Volume of the periodical

    32

  • Issue of the periodical within the volume

    11

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    12

  • Pages from-to

  • UT code for WoS article

    000680671700001

  • EID of the result in the Scopus database

    2-s2.0-85112750437