Resolution enhancement methods in optical microscopy for dimensional optical metrology

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F25%3AN0000120" target="_blank" >RIV/00177016:_____/25:N0000120 - isvavai.cz</a>

Result on the web

<a href="https://jeos.edpsciences.org/articles/jeos/full_html/2025/01/jeos20240060/jeos20240060.html" target="_blank" >https://jeos.edpsciences.org/articles/jeos/full_html/2025/01/jeos20240060/jeos20240060.html</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1051/jeos/2025002" target="_blank" >10.1051/jeos/2025002</a>

Result language

angličtina

Original language name

Resolution enhancement methods in optical microscopy for dimensional optical metrology

Original language description

In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

21100 - Other engineering and technologies

Project

<a href="/en/project/8B21001" target="_blank" >8B21001: Pushing boundaries of nano-dimensional metrology by light</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of the European Optical Society - Rapid Publications

ISSN

1990-2573

e-ISSN

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Volume of the periodical

21

Issue of the periodical within the volume

7

Country of publishing house

FR - FRANCE

Number of pages

20

Pages from-to

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UT code for WoS article

001426033500001

EID of the result in the Scopus database

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