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Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F09%3A00206835" target="_blank" >RIV/00216208:11320/09:00206835 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

  • Original language description

    The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 mis (duty cycle 10%) and the amplitude of the pulses was 400 V. The average discharge current reached about 250 mA. To obtain better stability of the discharge a 3.8 kOmega resistor was connected across the pulse switch. Consequently, there was a weak continuous dc discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Theirdependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 mis.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    WDS´09 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media

  • ISBN

    978-80-7378-102-6

  • ISSN

  • e-ISSN

  • Number of pages

    5

  • Pages from-to

  • Publisher name

    Matfyzpress

  • Place of publication

    Prague

  • Event location

    Prague

  • Event date

    Jan 1, 2009

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article