Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F09%3A00206835" target="_blank" >RIV/00216208:11320/09:00206835 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime
Original language description
The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 mis (duty cycle 10%) and the amplitude of the pulses was 400 V. The average discharge current reached about 250 mA. To obtain better stability of the discharge a 3.8 kOmega resistor was connected across the pulse switch. Consequently, there was a weak continuous dc discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Theirdependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 mis.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS´09 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-102-6
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
Matfyzpress
Place of publication
Prague
Event location
Prague
Event date
Jan 1, 2009
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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