Langmuir probe without RF compensation
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00126312" target="_blank" >RIV/00216224:14310/22:00126312 - isvavai.cz</a>
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1361-6595/ac83eb" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6595/ac83eb</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/ac83eb" target="_blank" >10.1088/1361-6595/ac83eb</a>
Alternative languages
Result language
angličtina
Original language name
Langmuir probe without RF compensation
Original language description
Langmuir probes with RF compensation are used for measurements of electron concentration, electron temperature and the DC value of plasma potential in RF discharges. In order to obtain all the RF components of plasma potential, simple probes without RF compensation are used. However, it has been believed that these uncompensated probes can not be used for determination of the DC value of plasma potential and of electron concentration and temperature, since their VA characteristics is distorted by the RF current. Consequently, the evaluation of data measured with uncompensated probes was not possible without additional measurement with a RF compensated Langmuir probe. This contribution analyzes the possibility to use uncompensated probes not only for measurement of RF components of plasma potential, but also for measurement of the DC component of plasma potential, electron concentration and electron temperature.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Sources Science and Technology
ISSN
0963-0252
e-ISSN
1361-6595
Volume of the periodical
31
Issue of the periodical within the volume
8
Country of publishing house
GB - UNITED KINGDOM
Number of pages
5
Pages from-to
1-5
UT code for WoS article
000841586300001
EID of the result in the Scopus database
2-s2.0-85136714911