Grazing-incidence x-ray diffraction from GaN epitaxial layers withthreading dislocations
Result description
We used high-resolution x-ray reciprocal space mapping in noncoplanar grazing-incidence geometry for the determination of the density of edge threading dislocations in c-oriented GaN epitaxial layers and we compared the measured intensity distributions with results of numerical Monte Carlo simulations of diffuse scattering. We demonstrated that a combination of diffraction data taken in coplanar symmetric and noncoplanar grazing-incidence geometries makes it possible to obtain the densities of screw andedge threading dislocations. (C) 2011 American Institute of Physics. [doi:10.1063/1.3543842]
Keywords
dislocationswiththreadinglayersepitaxialGaNdiffractionx-rayGrazing-incidence
The result's identifiers
Result code in IS VaVaI
Result on the web
DOI - Digital Object Identifier
Alternative languages
Result language
angličtina
Original language name
Grazing-incidence x-ray diffraction from GaN epitaxial layers withthreading dislocations
Original language description
We used high-resolution x-ray reciprocal space mapping in noncoplanar grazing-incidence geometry for the determination of the density of edge threading dislocations in c-oriented GaN epitaxial layers and we compared the measured intensity distributions with results of numerical Monte Carlo simulations of diffuse scattering. We demonstrated that a combination of diffraction data taken in coplanar symmetric and noncoplanar grazing-incidence geometries makes it possible to obtain the densities of screw andedge threading dislocations. (C) 2011 American Institute of Physics. [doi:10.1063/1.3543842]
Czech name
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Czech description
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Classification
Type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Physics Letters
ISSN
0003-6951
e-ISSN
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Volume of the periodical
98
Issue of the periodical within the volume
2
Country of publishing house
US - UNITED STATES
Number of pages
3
Pages from-to
021912, 1-3
UT code for WoS article
000286470800031
EID of the result in the Scopus database
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Basic information
Result type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP
BM - Solid-state physics and magnetism
Year of implementation
2011