Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10127058" target="_blank" >RIV/00216208:11320/12:10127058 - isvavai.cz</a>

Result on the web

<a href="http://download.springer.com/static/pdf/862/art%253A10.1134%252FS002016851208016X.pdf?auth66=1362218636_06c9e8467c04a180311c23ed41afa3ac&ext=.pdf" target="_blank" >http://download.springer.com/static/pdf/862/art%253A10.1134%252FS002016851208016X.pdf?auth66=1362218636_06c9e8467c04a180311c23ed41afa3ac&ext=.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1134/S002016851208016X" target="_blank" >10.1134/S002016851208016X</a>

Result language

angličtina

Original language name

Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions

Original language description

The chemical interaction of GaAs, GaSb, InAs, and InSb single crystals with H2O2-HBr-ethylene glycol bromine-releasing etchants has been studied under reproducible hydrodynamic conditions. We have located boundaries between regions of polishing and nonpolishing solutions, assessed the surface condition of the crystals using microstructural analysis and surface profiling, and optimized the compositions of the polishing solutions and dynamic chemical polishing conditions for the materials studied.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

CA - Inorganic chemistry

OECD FORD branch

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Project

<a href="/en/project/GAP102%2F10%2F0148" target="_blank" >GAP102/10/0148: Influence of Te inclusions on performance of CdTe and CdZnTe radiation detectors</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Inorganic Materials

ISSN

0020-1685

e-ISSN

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Volume of the periodical

48

Issue of the periodical within the volume

9

Country of publishing house

RU - RUSSIAN FEDERATION

Number of pages

5

Pages from-to

867-871

UT code for WoS article

000307562400002

EID of the result in the Scopus database

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