Atomic Force Microscopy in Optical Imaging and Characterization

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10129409" target="_blank" >RIV/00216208:11320/12:10129409 - isvavai.cz</a>
Result on the web
<a href="http://www.intechopen.com/books/atomic-force-microscopy-imaging-measuring-and-manipulating-surfaces-at-the-atomic-scale/afm-in-optical-imaging-and-characterization" target="_blank" >http://www.intechopen.com/books/atomic-force-microscopy-imaging-measuring-and-manipulating-surfaces-at-the-atomic-scale/afm-in-optical-imaging-and-characterization</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.5772/35559" target="_blank" >10.5772/35559</a>

Result language
angličtina
Original language name
Atomic Force Microscopy in Optical Imaging and Characterization
Original language description
Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Book/collection name
Atomic Force Microscopy - Imaging, Measuring and Manipulating Surfaces at the Atomic Scale
ISBN
978-953-51-0414-8
Number of pages of the result
20
Pages from-to
19-38
Number of pages of the book
256
Publisher name
InTech
Place of publication
Rijeka, Croatia
UT code for WoS chapter
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