Computational Study of Sheath Structure in the Presence of Magnetic Field

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10133152" target="_blank" >RIV/00216208:11320/12:10133152 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_215_f2_Ibehej.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_215_f2_Ibehej.pdf</a>
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Computational Study of Sheath Structure in the Presence of Magnetic Field
Original language description
The results of 2D particle and 3D particle/fluid hybrid simulations are presented. We investigated a plasma sheath formed near substrates of different shapes and showed the influence of magnetic field on the sheath structure and particle fluxes to the substrate. The studied solids were a cylindrical and a planar probe and a grooved planar substrate. The object of interest was idealized three-component plasma containing electrons and one species of positive and negative ions. This composition simulates frequently used plasma mixtures containing electronegative gas (e.g. oxygen or chlorine) and rare gas (e.g. argon). We used a simplified plasma composition to show general properties of electronegative plasmas interacting with solids. The effects of the presence of negative ions were investigated together with the effects of magnetic field. The simulations of plasma-solid interaction are useful not only for many plasma material treatment applications but also for an analysis of plasma pro
Czech name
—
Czech description
—

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'12 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-225-2
ISSN
—
e-ISSN
—
Number of pages
6
Pages from-to
87-92
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
May 29, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
—

Similar results(10)