Study of dynamic processes in multi-component low-temperature plasmas

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13450%2F19%3A43895376" target="_blank" >RIV/44555601:13450/19:43895376 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11320/19:10396277
Result on the web
<a href="https://reader.elsevier.com/reader/sd/pii/S0042207X18321493?token=17C510BB5C2B351B3A995DDE33A570EE76E9BE95498D91502999F747C7788C27E1953A18DCE9F7FBAFCD52977EA45E47" target="_blank" >https://reader.elsevier.com/reader/sd/pii/S0042207X18321493?token=17C510BB5C2B351B3A995DDE33A570EE76E9BE95498D91502999F747C7788C27E1953A18DCE9F7FBAFCD52977EA45E47</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2019.03.031" target="_blank" >10.1016/j.vacuum.2019.03.031</a>

Result language
angličtina
Original language name
Study of dynamic processes in multi-component low-temperature plasmas
Original language description
Two-dimensional particles in cells with Monte Carlo collision models are used to describe the behaviour of a plasma sheath in a multi-component plasma. An electronegative O-2/Ar plasma is assumed, and planar or cylindrical substrates are used in the simulations. The aim of the study is to clarify the influence of plasma composition, pressure and substrate geometry on sheath formation and the behaviour of charged species in both the steady-state and dynamic regimes in multi-component plasmas.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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