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Study of dynamic processes in multi-component low-temperature plasmas

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13450%2F19%3A43895376" target="_blank" >RIV/44555601:13450/19:43895376 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216208:11320/19:10396277

  • Result on the web

    <a href="https://reader.elsevier.com/reader/sd/pii/S0042207X18321493?token=17C510BB5C2B351B3A995DDE33A570EE76E9BE95498D91502999F747C7788C27E1953A18DCE9F7FBAFCD52977EA45E47" target="_blank" >https://reader.elsevier.com/reader/sd/pii/S0042207X18321493?token=17C510BB5C2B351B3A995DDE33A570EE76E9BE95498D91502999F747C7788C27E1953A18DCE9F7FBAFCD52977EA45E47</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.vacuum.2019.03.031" target="_blank" >10.1016/j.vacuum.2019.03.031</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Study of dynamic processes in multi-component low-temperature plasmas

  • Original language description

    Two-dimensional particles in cells with Monte Carlo collision models are used to describe the behaviour of a plasma sheath in a multi-component plasma. An electronegative O-2/Ar plasma is assumed, and planar or cylindrical substrates are used in the simulations. The aim of the study is to clarify the influence of plasma composition, pressure and substrate geometry on sheath formation and the behaviour of charged species in both the steady-state and dynamic regimes in multi-component plasmas.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Vacuum

  • ISSN

    0042-207X

  • e-ISSN

  • Volume of the periodical

    neuveden

  • Issue of the periodical within the volume

    164

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    4

  • Pages from-to

    308-311

  • UT code for WoS article

    000467510900047

  • EID of the result in the Scopus database

    2-s2.0-85063262868