A Study of Sheath in Argon Plasma Containing Sputtered Metal
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10192277" target="_blank" >RIV/00216208:11320/13:10192277 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf13/WDS13_208_f2_Ibehej.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf13/WDS13_208_f2_Ibehej.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
A Study of Sheath in Argon Plasma Containing Sputtered Metal
Original language description
We present results of a two-dimensional particle model of plasma-solid boundary. The model follows trajectories of charged species in plasma which form sheath and pre-sheath layers in the vicinity of a biased substrate. We studied sheath parameters and particle transport through the sheath in high-density argon plasma containing sputtered metal ions. The plasma parameters were taken from a volume-averaged model of inductively coupled plasma during ionized physical vapour deposition (IPVD) using magnetron sputtering. Our model simulated the capability of IPVD to ll the high-aspect-ratio trenches and evaluated local fluxes, energy and angular distributions of ions impinging on the trench. We observed that the substrate bias influenced the energy of ionsbut not their flux. Therefore, these quantities can be regulated independently by changing bias and magnetron power.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GAP205%2F10%2F0979" target="_blank" >GAP205/10/0979: Study of the interaction of chemically active plasmas with solid surfaces at medium and higher pressures</a><br>
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS'13 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-251-1
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
54-59
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
Jun 4, 2013
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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