Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00567159" target="_blank" >RIV/68378271:_____/22:00567159 - isvavai.cz</a>

Result on the web

<a href="https://hdl.handle.net/11104/0338436" target="_blank" >https://hdl.handle.net/11104/0338436</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions

Original language description

Measurements of the ion flux-energy distribution functions with an energy-selective mass spectrometer at the high sheath potential of the grounded electrode are presented for a variety of conditions and ions. The potential for suppressing low-energy ions from resonant charge transfer collisions in the sheath by the dilution of the working gas is demonstrated. Additionally, the setup is supplemented by an inductively coupled plasma that controls the plasma density and consequently the ion flux to the substrate while the radio frequency bias controls the ion energy. At high ion energies, metal ions are detected as a consequence of the ionization of sputtered electrode material. The proposed setup opens a way to study precisely the effects of ion treatment for a variety of substrates such as catalysts, polymers, or thin films.

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

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Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů