Study of structural and electrical properties of thin NiOx films prepared by ion beam sputtering of Ni and subsequent thermo-oxidation

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10173491" target="_blank" >RIV/00216208:11320/13:10173491 - isvavai.cz</a>

Alternative codes found

RIV/61389005:_____/13:00421053 RIV/60461373:22340/13:43895836

Result on the web

<a href="http://dx.doi.org/10.1140/epjb/e2013-30969-6" target="_blank" >http://dx.doi.org/10.1140/epjb/e2013-30969-6</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1140/epjb/e2013-30969-6" target="_blank" >10.1140/epjb/e2013-30969-6</a>

Result language

angličtina

Original language name

Study of structural and electrical properties of thin NiOx films prepared by ion beam sputtering of Ni and subsequent thermo-oxidation

Original language description

Nickel oxide thin films were prepared by thermal annealing of thin Ni films (thickness ca 47 nm) deposited by ion beam sputtering. The thermal annealing was performed at 350 degrees C and 400 degrees C with elected time (1-7 hours) in a quartz furnace opened to air. During annealing the samples underwent structural changes, as well as changes of their electrical properties. The structural properties (surface morphology and occurrence of crystalline phases) were analyzed by the AFM and XRD methods, O andNi depth concentration profiles by the NRA method, and electrical properties (sheet resistance) by the van der Pauw 4-point technique. The sheet resistance (R-S) of the as-deposited sample was found to be 12.03 Omega/square; after open air thermal annealing at 350 degrees C for 1 h the value was found to be almost the same, 11.67 Omega/square. After 2 h of annealing, however, a sharp increase in the sheet resistance (R-S = 1.46 M Omega/square) was observed. At this stage the deposit for

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GBP108%2F12%2FG108" target="_blank" >GBP108/12/G108: Preparation, modification and characterization of materials by radiation</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

European Physical Journal B

ISSN

1434-6028

e-ISSN

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Volume of the periodical

86

Issue of the periodical within the volume

11

Country of publishing house

DE - GERMANY

Number of pages

6

Pages from-to

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UT code for WoS article

000326811500006

EID of the result in the Scopus database

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