Parametric computational study of sheaths in multicomponent Ar/O-2 plasma

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F18%3A10389476" target="_blank" >RIV/00216208:11320/18:10389476 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1088/1742-6596/982/1/012008" target="_blank" >https://doi.org/10.1088/1742-6596/982/1/012008</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1742-6596/982/1/012008" target="_blank" >10.1088/1742-6596/982/1/012008</a>

Result language
angličtina
Original language name
Parametric computational study of sheaths in multicomponent Ar/O-2 plasma
Original language description
Our study is devoted to sheath structures emerging in Ar/O-2 plasma. By means of two dimensional PIC/MCC computer model two configurations were investigated - sheath structure in the vicinity of a cylindrical Langmuir probe for two different biases and changes of the sheath structure when a cylindrical probe passes into a semi-planar probe. It was shown that O+ ions play important role in shielding out negative bias of a solid immersed in Ar/O-2 plasma and edge effects of a semi-planar probe on its sheath structure were evaluated.
Czech name
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Czech description
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Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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