Plasma Diagnostics of Hollow Cathode Plasma-jet for Deposition of Iron Oxide Thin Films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F19%3A10406024" target="_blank" >RIV/00216208:11320/19:10406024 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf19/WDS19_09_f2_Tuharin.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf19/WDS19_09_f2_Tuharin.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Plasma Diagnostics of Hollow Cathode Plasma-jet for Deposition of Iron Oxide Thin Films
Original language description
The perspectives of iron oxide films and it sulfidation for dye-sensitized solar cell (DSSC) are reviewed. The iron oxide thin films were prepared by the hollow cathode plasma jet sputtering with the admixture of the oxygen in the argon working gas and with the iron nozzle as the sputtering target. The discharge is powered by the constant current source in the continuous mode and by the constant voltage source in the pulsed mode. Plasma composition was measured by the mass spectrometer. Moreover, SEM and Raman spectra of films are presented.
Czech name
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Czech description
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Project
<a href="/en/project/GA19-00579S" target="_blank" >GA19-00579S: Advanced diagnostics of reactive HiPIMS plasma for deposition of oxide, nitride and sulfide layers</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'19 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-409-6
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
49-53
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Prague, Czech Republic
Event date
Jun 4, 2019
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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