Measurement of velocities of copper nanoparticles exiting a gas aggregation source

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10454480" target="_blank" >RIV/00216208:11320/22:10454480 - isvavai.cz</a>

Result on the web

<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=KKtI4bdoQY" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=KKtI4bdoQY</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2022.111114" target="_blank" >10.1016/j.vacuum.2022.111114</a>

Result language

angličtina

Original language name

Measurement of velocities of copper nanoparticles exiting a gas aggregation source

Original language description

Gas aggregation sources have become a valuable tool for the effective production of nanoparticles and nano-particle films. In some cases (e.g. during in-flight coating of nanoparticles or interaction between nanoparticles and substrate), the critical parameter that influences the applicability of these sources and properties of fabri-cated nanomaterials is the velocity of produced nanoparticles. Naturally, to control the speed of nanoparticles, it is crucial to determine how it is influenced by process parameters. A mechanical time-of-flight filter has been used to measure the velocities of nanoparticles exiting a magnetron-based gas aggregation source. Nanoparticle velocities have been investigated for various deposition conditions, including aggregation chamber pressure from 20 to 100 Pa, magnetron current from 100 to 500 mA and deposition chamber pressure from 0.015 to 2.5 Pa. Nanoparticles may be accelerated in the area around the exit orifice and decelerated by the background gas in the deposition chamber. This allows tailoring the nanoparticle velocity in the range from 10 m s(-1) up to over 100 m s(-1). Furthermore, the dependence of the velocity of nanoparticles on their size was found to obey a simple power law. Therefore, the filter may be used not only as a velocity filter but also as a mass filter.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/GJ20-15405Y" target="_blank" >GJ20-15405Y: Investigation of interaction of nanoparticles produced by gas aggregation source with substrate</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Vacuum

ISSN

0042-207X

e-ISSN

1879-2715

Volume of the periodical

202

Issue of the periodical within the volume

srpen

Country of publishing house

GB - UNITED KINGDOM

Number of pages

10

Pages from-to

111114

UT code for WoS article

000800470900002

EID of the result in the Scopus database

2-s2.0-85129932095