Effect of exit-orifice size on Cu nanoparticles produced by gas-aggregation source

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43962657" target="_blank" >RIV/49777513:23520/21:43962657 - isvavai.cz</a>

Alternative codes found

RIV/49777513:23520/21:43963392

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Effect of exit-orifice size on Cu nanoparticles produced by gas-aggregation source

Original language description

In nanoparticle production by magnetron sputtering and subsequent gas aggregation, there are many parameters influencing the process of nanoparticle formation. One of the key parameters is the pressure of the background working gas. The pressure is usually controlled by adjusting the flow rate, which however leads to an undesirable simultaneous change of two important parameters, both influencing the formation of the nanoparticles. In this work, we introduce an additional parameter influencing the pressure of the working gas. Changing the aggregation chamber exit-orifice size allows us to change the pressure and flow rate independently and separate their effects. The experimental results show that the conventional approach of changing pressure by adjusting the flow rate (at a constant orifice diameter) does not significantly influence the nanoparticle size or their deposition rate. However, when the pressure or the flow rate is held constant, changing the other parameter has a notable effect. We suggest that the determining parameter which needs to be considered is the pressure to flow rate ratio. This ratio determines the residence time of the nanoparticles inside the aggregation chamber (and therefore the time available for them to grow) and is constant for a constant orifice diameter. Decreasing the orifice diameter, however, increases the pressure to flow rate ratio, gives the nanoparticles longer time inside the aggregation chamber and allows them to grow larger. Apart from their size, the orifice diameter also influences the deposition rate and its angular distribution.

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

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OECD FORD branch

20506 - Coating and films

Project

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Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů