Plasma polymers prepared by RF sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F99%3A11110009" target="_blank" >RIV/00216208:11320/99:11110009 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Plasma polymers prepared by RF sputtering
Original language description
Fluorocarbon and hydrocarbon plasma polumer films were prepared by means of rf. self-sputtering of PTFE and polyethylene targets in a parallel plate electrode system with the magnetron facing down the substrate. The films obtained were studied by scanning electrom microscopy and FTIR spectroscopy. Possibilities of this technology are discussed.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
1999
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
IEE Science, Education and Technology
ISSN
0963-3308
e-ISSN
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Volume of the periodical
1999
Issue of the periodical within the volume
26
Country of publishing house
GB - UNITED KINGDOM
Number of pages
4
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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