Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F01%3A00004228" target="_blank" >RIV/00216224:14310/01:00004228 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

Original language description

Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filleddetector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparisonof the reflectivity from the reference planar multilayer completes the study.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

J. Phys. D: Appl. Phys.

ISSN

0022-3727

e-ISSN

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Volume of the periodical

34

Issue of the periodical within the volume

10A

Country of publishing house

GB - UNITED KINGDOM

Number of pages

5

Pages from-to

"A188"

UT code for WoS article

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EID of the result in the Scopus database

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