X-ray reflectivity study of a W/Si multilayer grating

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F01%3A00006979" target="_blank" >RIV/00216224:14310/01:00006979 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

X-ray reflectivity study of a W/Si multilayer grating

Original language description

Multilayer gratings are artificially patterned multilyer thin films with the periodicities both in the lateral and normal directions which renders them attracting for microelectronic and optical applications. A proper structural characterization is of primary importance. To test the capability of the X-ray reflectometry technique to fulfil this task, a tungsten/silicon multilayer grating prepared by electron beam evaporation and electron beam lithography was studied both in the coplanar and non-coplanargeometries., the nominal lateral and normal periods being 800 nm and 8 nm, respectively. The coplanar measurements were evaluated within the dynamical theory of X-ray scattering on rough gratings and provided the structural parameters of a real structure with a reasonable precision which are close to the nominal ones. The results revealed also some imperfections of the deposition and masking procedures which are discussed. The non-coplanar measurements were evaluated qualitatively using

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Superficies y Vacío

ISSN

1665-3521

e-ISSN

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Volume of the periodical

2001

Issue of the periodical within the volume

13

Country of publishing house

MX - MEXICO

Number of pages

5

Pages from-to

10

UT code for WoS article

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EID of the result in the Scopus database

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