Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F01%3A00004542" target="_blank" >RIV/00216224:14310/01:00004542 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy

Original language description

Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentrationof atomic oxygen atom was monitored by actinometry.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

WDS'01 Proceedings of Contributed Papers

ISBN

80-85863-73-1

ISSN

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e-ISSN

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Number of pages

6

Pages from-to

400

Publisher name

matfyzpress

Place of publication

Praha

Event location

Praha

Event date

Jan 1, 2001

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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