Optical diagnostics of atmospheric pressure glow discharge in nitrogen with admixture of organosilicon
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00008135" target="_blank" >RIV/00216224:14310/03:00008135 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical diagnostics of atmospheric pressure glow discharge in nitrogen with admixture of organosilicon
Original language description
The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon compounds such as hexamethyldisilazane and hexamethyldisiloxane was studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of ICPIG XXVI
ISBN
3-00-011689-3
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
53
Publisher name
Local Organizing Committee of ICPIG
Place of publication
Greifswald
Event location
July 15 - 20, Greifswald, Germany
Event date
Jan 1, 2003
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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