Deposition of thin films on glass substrate in atmospheric pressure glow discharge
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020681" target="_blank" >RIV/00216224:14310/07:00020681 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Deposition of thin films on glass substrate in atmospheric pressure glow discharge
Original language description
The atmospheric pressure glow discharge was used for the deposition of thin organosilicon polymer films. The discharge was burning in pure nitrogen used as a carrier gas with a small admixture of organosilicon compound (hexamethyldisiloxane HMDSO) whichwas used as a monomer. Thin films was deposited on the glass substrate. The temperature of the substrate was elevated up to 120 C to obtain harder thin films. Electrical measurements were used to distinguish between glow and filamentary regime. The surface atomic composition was measured by means of Xray Photoelectron Spectroscopy (XPS) and Fourier Transform Infrared Spectroscopy (FTIR). Mechanical properties of deposited films were characterised by depth sensing indentation technique. The films were transparent in visible range. The comparison with thin films deposited on the silicon substrate is provided.
Czech name
Depozice tenkých vrstev v atmosférickém doutnavém výboji na skleněný substrát.
Czech description
Doutnavý výboj za atmosférického tlaku byl použit k depozici tenkých vrstev na skleněný substrát z monomeru hexamethyldisiloxanu (HMDSO).
Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—
Result continuities
Project
<a href="/en/project/GA202%2F06%2F1473" target="_blank" >GA202/06/1473: Deposition of thin films in dielectric barrier discharges at atmospheric pressure</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Book of Contributed Papers of The 3rd Seminar on New Trends in Plasma Physics and Solid State Physics
ISBN
978-80-89186-24-2
ISSN
—
e-ISSN
—
Number of pages
4
Pages from-to
144-147
Publisher name
Library and Publishing Centre in collaboration with Department of Experimental Physics, Comenius University, Bratislava, Slovakia; Union of Slovak Mathematicians and Physicists, Bratislava, Slovakia
Place of publication
Bratislava, Slovensko
Event location
Bratislava, Slovakia
Event date
Oct 4, 2007
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
—