Synchrotron-radiation computed laminography for high-resolution three-dimensional imaging of flat devices

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00022443" target="_blank" >RIV/00216224:14310/07:00022443 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Synchrotron-radiation computed laminography for high-resolution three-dimensional imaging of flat devices

Original language description

Synchrotron-radiation computed laminography (SRCL) is developed as a method for high-resolution three-dimensional (3D) imaging of regions of interest (ROIs) in all kinds of laterally extended devices. One of the application targets is the 3D X-ray inspection of microsystems. In comparison to computed tomography (CT), the method is based on the inclination of the tomographic axis with respect to the incident X-ray beam by a defined angle. With the microsystem aligned roughly perpendicular to the rotationaxis, the integral X-ray transmission on the two-dimensional (2D) detector does not change exceedingly during the scan. In consequence, the integrity of laterally extended devices can be preserved, what distinguishes SRCL from CT where ROIs have to be destructively extracted (e.g. by cutting out a sample) before being imaged. The potential of the method for three-dimensional imaging of microsystem devices will be demonstrated by examples of flip-chip bonded and wire-bonded devices.

Czech name

Synchrotronová výpočetní laminografie pro 3D zobrazení plochých objektů s velkým rozlišením

Czech description

Synchrotronová výpočetní laminografie (SRCL) byla vyvinuta jako metoda pro 3D zobrazování s vysokým rozlišením pro oblasti v laterálně velkých objektech, například elektronických mikrosystémech. Ve srovnání s počítačovou tomografií (CT) využívá SRCL nakloněné osy rotace vzhledem k dopadajícímu záření. Potenciál metody je demonstrován na příkladech studia kontaktovaných elektronických čipů.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica stat.sol.(a)

ISSN

0031-8965

e-ISSN

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Volume of the periodical

204

Issue of the periodical within the volume

8

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

6

Pages from-to

2760-2765

UT code for WoS article

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EID of the result in the Scopus database

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