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Measurement of ions in H2 - N2 capacitively coupled discharge

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00023975" target="_blank" >RIV/00216224:14310/07:00023975 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Measurement of ions in H2 - N2 capacitively coupled discharge

  • Original language description

    Neutral molecules and especially positive ions and their energy distributions were measured in low-pressure (ca 4 Pa) high frequency (13,56 MHz) capacitively coupled discharge ignited in the mixtures of hydrogen and nitrogen. Especially, the hydrogen-rich mixtures were investigated. Firstly, the energy dependence of the spectrometer was calculated and the ion energy distributions were corrected. The dominant ions were H3+ and HN2+. Ions without hydrogen (N2+ and N+) were significant only at low hydrogenconcentration (less than 10%). Also a high amount of ions NH4+ was detected. The nitrogen addition caused a quite steep decrease of the dominant hydrogen ion H3+. Further, an unusual behaviour of NH4+ and H+ was observed. Concerning creation of neutralstable molecules, only a small amount of ammonia was detected.

  • Czech name

    Měření iontů v kapacitně vázaném výboji buzeném ve směsi vodíku a dusíku

  • Czech description

    Byly měřeny relativní koncentrace kladných iontů a neutrálních molekul v nízkotlakém kapacitně vázaném plazmatu buzeném ve směsi vodíku a dusíku, zejména ve směsích s převahou vodíku. Dominantními ionty byly částice H3+ a N2H+, ve velkém množství byly přítomné i amonné ionty NH4+.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2007

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of XXVIII International Conference on Phenomena in Ionized Gases

  • ISBN

    978-80-87026-01-4

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

  • Publisher name

    J. Schmidt, M. Šimek, S. Pekárek, V. Prukner

  • Place of publication

    Praha

  • Event location

    Praha

  • Event date

    Jan 1, 2007

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article