Electromagnetic field distribution modelling in microlenses fabrication process
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00030102" target="_blank" >RIV/00216224:14310/07:00030102 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/07:#0000391
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Electromagnetic field distribution modelling in microlenses fabrication process
Original language description
In this article, theoretical modelling of electromagnetic field distribution in the exposed thin film during lithographic process of microlenses array formation is presented. While studying topography of microlenses by means of atomic force microscopy wehave found that various diffraction effects are observed due to the small dimensions of microlens patterns comparing to the wavelength. In this article we use finite-difference in time domain (FDTD) method to model electromagnetic field distribution incomplex pattern-film geometry. Within FDTD, we solve Maxwell equations numerically, which enables us to model any type of geometry or material properties. Therefore, the effects of different perturbations, like pattern boundary imperfections or thin filmroughness can be studied within this method, showing their effect on the electromagnetic field distribution within illuminated chalcogenide thin film.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/FT-TA3%2F142" target="_blank" >FT-TA3/142: Analysis of the optical properties of solar cells.</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physics and Chemistry of Solids
ISSN
0022-3697
e-ISSN
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Volume of the periodical
68
Issue of the periodical within the volume
5-6
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
4
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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