Plasma treatment of silicon surface
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00040567" target="_blank" >RIV/00216224:14310/10:00040567 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Plasma treatment of silicon surface
Original language description
The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surfacefree energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/KAN101630651" target="_blank" >KAN101630651: Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>O - Projekt operacniho programu
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Potential and Applications of Thin Ceramic and Metal Coatings
ISBN
978-80-7043-894-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
University of West Bohemia
Place of publication
Plzeň
Event location
Plzeň
Event date
May 26, 2010
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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