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Plasma treatment of silicon surface

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00040567" target="_blank" >RIV/00216224:14310/10:00040567 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Plasma treatment of silicon surface

  • Original language description

    The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surfacefree energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/KAN101630651" target="_blank" >KAN101630651: Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)<br>O - Projekt operacniho programu

Others

  • Publication year

    2010

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Potential and Applications of Thin Ceramic and Metal Coatings

  • ISBN

    978-80-7043-894-7

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

  • Publisher name

    University of West Bohemia

  • Place of publication

    Plzeň

  • Event location

    Plzeň

  • Event date

    May 26, 2010

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article