Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00040642" target="_blank" >RIV/00216224:14310/10:00040642 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling
Original language description
A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into thebulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$times$ larger than the result of Langmuir probe measurement.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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