Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00044824" target="_blank" >RIV/00216224:14310/10:00044824 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages

Original language description

A promising method for monitoring of reactive magnetron sputtering, based on the measurement of amplitudes of higher harmonic frequencies of discharge voltages, is proposed. The measurement of the amplitudes can be performed either by an uncompensated probe in the plasma or on the cable between the RF generator and the sputtered target. The sensitivity of the proposed method is significantly better than measurement of other electrical quantities conventionally used for process control. Physical reasonsfor the change of amplitudes of higher harmonic frequencies during the mode transition were found. The paper shows that the observed changes in amplitudes of higher harmonics by the transition are not caused either by the pressure change, or by the changes in the composition of the gas in the reactor volume. It was found that the amplitudes of higher harmonics reflect primarily the state of the magnetron target poisoning.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/GP202%2F08%2FP038" target="_blank" >GP202/08/P038: Study of hybrid deposition process and its application for thin film deposition</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Plasma Sources Sci. Technol.

ISSN

0963-0252

e-ISSN

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Volume of the periodical

19

Issue of the periodical within the volume

5

Country of publishing house

GB - UNITED KINGDOM

Number of pages

8

Pages from-to

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UT code for WoS article

000282096600016

EID of the result in the Scopus database

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