OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00047524" target="_blank" >RIV/00216224:14310/10:00047524 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS
Original language description
Amorphous hydrogenated carbon films can be used, besides tribological applications, in photonics. It can include such applications like antireflective coatings, photosensitive materials or thickness monitoring. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. These effects can be achieved by doping with nitrogen. In this contribution, nitrogen doped diamond-like carbon films (DLC:N) were depositedon silicon substrates by plasma enhanced chemical vapor deposition (PECVD) method using a mixture of methane, hydrogen and nitrogen as reactants. Discharge was excited in capacitively coupled configuration at 13.56 MHz. The bias voltage, working pressureand temperature were changed to vary film optical properties. The optical properties of the films were investigated using UV-VIS reflectometry, ellipsometry and FTIR transmittance measurement.
Czech name
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Czech description
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Project
<a href="/en/project/GD104%2F09%2FH080" target="_blank" >GD104/09/H080: Plasmachemical processes and their technological applications</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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