PREPARATION AND CHARACTERIZATION OF DLC:N FILMS

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00049718" target="_blank" >RIV/00216224:14310/10:00049718 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
PREPARATION AND CHARACTERIZATION OF DLC:N FILMS
Original language description
Diamond-like carbon (DLC) exhibits useful properties such as wide band gaps, high thermal conductivities, high hardness and low friction coefficient. Technical difficulties due to inherent internal stress in preparation of DLC films on metallic substrates are the cause of it's poor adhesion. Nitrogen doped diamond-like carbon (DLC:N) films were deposited by plasma enhanced chemical vapuor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane, hydrogen and nitrogen on silicon, glass and metallic substrates (stainless steel). Gas mixture, bias and discharge frequency were changed to modify the parameters of the deposited films. The optical properties of the deposited films were investigated by: reflectometry, ellipsometry and FTIR transmittance measurement. Depth sensing indentation technique was used to determine hardness and elastic modulus.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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