Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00047540" target="_blank" >RIV/00216224:14310/10:00047540 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates
Original language description
Diamond-like carbon (DLC) and hydrogenated amorphous carbon (a-C:H) films has grown enormously due to their particular and useful properties such as their wide band gaps, high thermal conductivities, high hardness and low friction coefficient. However, there are some technical difficulties in their preparation especially on metallic substrates, where the adhesion is poor. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge (13.56 or 27.12 MHz) in the mixture of CH4/H2/N2 on silicon, glass and metallic substrates. The pressure was maintained below 20 Pa. DC self-bias and gas feed composition parameters were used for modification of the mechanical properties, adhesion to different substrates, chemical composition and structure of the deposited films.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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