Mechanical properties of thin films deposited by TVA and G-TVA methods

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F11%3A00049427" target="_blank" >RIV/00216224:14310/11:00049427 - isvavai.cz</a>

Alternative codes found

RIV/49777513:23210/11:43898620

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Mechanical properties of thin films deposited by TVA and G-TVA methods

Original language description

The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper anextension of TVA method from gases (G-TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enor- mously the applicability of the TVA technique for the synthe- sis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The de- scribed methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/KAN311610701" target="_blank" >KAN311610701: Nanometrology using methods of scanning probe microscopy</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Chemicke Listy

ISSN

0009-2770

e-ISSN

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Volume of the periodical

105/2011

Issue of the periodical within the volume

14

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

4

Pages from-to

132-135

UT code for WoS article

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EID of the result in the Scopus database

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