Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F11%3A00049858" target="_blank" >RIV/00216224:14310/11:00049858 - isvavai.cz</a>

Alternative codes found

RIV/68081723:_____/11:00362870

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

Original language description

Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherentnc-TiC/a-C:H coatings ~5 um thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. Themechanical properties ? hardness and Young's modulus ? measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface & Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

205

Issue of the periodical within the volume

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Country of publishing house

DE - GERMANY

Number of pages

4

Pages from-to

53-56

UT code for WoS article

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EID of the result in the Scopus database

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