TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F11%3A00370065" target="_blank" >RIV/68081723:_____/11:00370065 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

Original language description

Composites have often desirable combinations of properties that are not found in the individual components. Nanocrastaline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient . These coatings are usually deposited by the hybrid PVD-PECVD process using the unbalanced of even the close-field unbalanced magnetic field configuration in order to enhance the ion bombardment of the growing film. The thickness of these coatings ranges typically from several hundreds of nm up to 3?m. The aim of the recent work was to prepare well adherent nc- TiC/a -C:H coatings about 5?m thick on various substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate.

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů