Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F11%3A00050732" target="_blank" >RIV/00216224:14310/11:00050732 - isvavai.cz</a>
Result on the web
<a href="http://iopscience.iop.org/2040-8986/13/8/085705/" target="_blank" >http://iopscience.iop.org/2040-8986/13/8/085705/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/2040-8978/13/8/085705" target="_blank" >10.1088/2040-8978/13/8/085705</a>
Alternative languages
Result language
angličtina
Original language name
Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films
Original language description
A theoretical approach for including considerable thickness non-uniformity of thin films into the formulae employed within variable-angle spectroscopic ellipsometry is presented. It is based on a combination of the efficient formulae derived for the thickness distribution density corresponding to a wedge-shaped non-uniformity with dependences of the mean thickness and root mean square (rms) of thickness differences on the angle of incidence that take into account the real non-uniformity of the shape. These dependences are derived using momentum expansion of the thickness distribution density. The derived formulae are tested by means of numerical analysis. An application of this approach is illustrated using the optical characterization of a selected sample of non-uniform SiOxCyHz thin films using phase-modulated ellipsometry.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Optics
ISSN
2040-8978
e-ISSN
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Volume of the periodical
13
Issue of the periodical within the volume
8
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
"nestránkováno"
UT code for WoS article
000294294500018
EID of the result in the Scopus database
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