Ellipsometric characterisation of thin films non-uniform in thickness

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F48399108%3A_____%2F11%3A%230000016" target="_blank" >RIV/48399108:_____/11:#0000016 - isvavai.cz</a>
Alternative codes found
RIV/00216224:14310/11:00050721
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Ellipsometric characterisation of thin films non-uniform in thickness
Original language description
Ellipsometric formulae for thin films non-uniform in thickness are presented. A general type of thickness nonuniformity is considered and the influence of the varying angle of incidence is taken into account. The presented formulae are applied to the optical characterisation of polymer SiO2-like thin films exhibiting a relatively strong thickness non-uniformity. It is shown that the complete optical characterisation of these polymer thin films can be performed. Thus, the spectral dependences of the optical constants, mean thickness and parameters related to the shape of thickness non-uniformity can be determined.
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—

Project
<a href="/en/project/FT-TA5%2F114" target="_blank" >FT-TA5/114: Development of technology of PECVD films formation for automotive lighting equipment</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)