Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F08%3A00025137" target="_blank" >RIV/00216224:14310/08:00025137 - isvavai.cz</a>

Alternative codes found

RIV/00216224:14310/08:00025180 RIV/00216224:14310/09:00029162 RIV/00216305:26210/08:PU75019

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

Original language description

Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. Thesecond formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the

Czech name

Optická charakterizace diamantu podobných tenkých vrstev neuniformních v tloušťce za pomocí spektroskopické reflektometrie

Czech description

Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. Thesecond formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GA202%2F07%2F1669" target="_blank" >GA202/07/1669: Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2008

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Volume of the periodical

17

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

4

Pages from-to

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UT code for WoS article

000256643300066

EID of the result in the Scopus database

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