Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F15%3APU115455" target="_blank" >RIV/00216305:26210/15:PU115455 - isvavai.cz</a>
Alternative codes found
RIV/60162694:G43__/15:00531740 RIV/00216224:14310/15:00094363
Result on the web
<a href="http://dx.doi.org/10.1117/12.2191052" target="_blank" >http://dx.doi.org/10.1117/12.2191052</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2191052" target="_blank" >10.1117/12.2191052</a>

Result language
angličtina
Original language name
Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films
Original language description
Imaging spectroscopic reflectometry (ISR) provides methods enabling us to perform an optical characterization of thin films non-uniform in optical parameters (e.g. in thickness). It measures spectral dependencies of a local reflectance at normal incidence of light belonging to small areas on these films (37x37 µm^2 in our case) imaged onto individual pixels of a CCD camera serving as a detector of a spectrophotometer. The local reflectance can mostly be expressed using formulas corresponding to a uniform thin film. There are three methods for treating ISR experimental data in the special case of thickness non-uniformity, i.e. in the case of the same optical constants along the whole area of the film: i) If optical constants of the non-uniform film are known, spectral dependencies of the local reflectance are used to determine a map of the local film thickness (one pixel method). ii) If optical constants are unknown, spectral dependencies of these constants are determined using standard spectroscopic
Czech name
—
Czech description
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
ISBN
9781628418170
ISSN
0277-786X
e-ISSN
—
Number of pages
13
Pages from-to
"0R-1"-"0R-13"
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Jena
Event date
Sep 7, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000366832100013

Similar results(10)