Measurement of the thickness distribution and optical constants of non-uniform thin films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F11%3A00050733" target="_blank" >RIV/00216224:14310/11:00050733 - isvavai.cz</a>

Alternative codes found

RIV/00177016:_____/11:#0000385 RIV/00216305:26210/11:PU96417

Result on the web

<a href="http://iopscience.iop.org/0957-0233/22/8/085104/" target="_blank" >http://iopscience.iop.org/0957-0233/22/8/085104/</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0957-0233/22/8/085104" target="_blank" >10.1088/0957-0233/22/8/085104</a>

Result language

angličtina

Original language name

Measurement of the thickness distribution and optical constants of non-uniform thin films

Original language description

In this paper, an original method for the complete optical characterization of thin films exhibiting area thickness non-uniformity is presented. This method is based on interpreting experimental data obtained using an original imaging spectroscopic photometer operating in the reflection mode at normal incidence of light. A CCD camera is employed as a detector of the photometer. The spectral dependences of the reflectance measured simultaneously by individual pixels of the CCD camera correspond to the local reflectance of small areas of the non-uniform thin films characterized. These areas form a matrix along a relatively large part of the substrate covered with the non-uniform film. The spectral dependences of the local reflectance measured by the individual pixels are treated separately by means of the formulae for the reflectance valid for uniform thin films.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

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Volume of the periodical

22

Issue of the periodical within the volume

8

Country of publishing house

GB - UNITED KINGDOM

Number of pages

8

Pages from-to

"nestránkováno"

UT code for WoS article

000292775000006

EID of the result in the Scopus database

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