Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F15%3APU115453" target="_blank" >RIV/00216305:26210/15:PU115453 - isvavai.cz</a>
Alternative codes found
RIV/00216224:14310/15:00094362
Result on the web
<a href="http://dx.doi.org/10.1117/12.2190091" target="_blank" >http://dx.doi.org/10.1117/12.2190091</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2190091" target="_blank" >10.1117/12.2190091</a>

Result language
angličtina
Original language name
Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry
Original language description
A new optical characterization method based on imaging spectroscopic reflectometry (ISR) is presented and illustrated on the characterization of rough non-uniform epitaxial ZnSe films prepared on GaAs substrates. The method allows the determination of all parameters describing the thin films exhibiting boundary roughness and non-uniformity in thickness, i.e. determination of the spectral dependencies of the optical constants, map of local thickness and map of local rms values of heights of the irregularities for the rough boundaries. The local normal reflectance spectra in ISR correspond to small areas (37x37 µm2 ) on the thin films measured within the spectral range 270–900 nm by pixels of a CCD camera serving as the detector of imaging spectrophotometer constructed in our laboratory. To our experience the small areas corresponding to the pixels are sufficiently small so that the majority of the films can be considered uniform in all parameters within these areas. Boundary roughness is included i
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical Systems Design 2015: Advances in Optical Thin Films V
ISBN
9781628418170
ISSN
0277-786X
e-ISSN
—
Number of pages
9
Pages from-to
"0C-1"-"0C-9"
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Jena
Event date
Sep 7, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000366832100005

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