Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F16%3A00087663" target="_blank" >RIV/00216224:14740/16:00087663 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26210/16:PU118776
Result on the web
<a href="http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta" target="_blank" >http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/2040-8978/18/1/015401" target="_blank" >10.1088/2040-8978/18/1/015401</a>

Result language
angličtina
Original language name
Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry
Original language description
A rough non-uniform ZnSe thin film on a GaAs substrate is optically characterised using imaging spectroscopic reflectometry (ISR) in the visible, UV and near IR region, applied as a standalone technique. A global-local data processing algorithm is used to fit spectra from all pixels together and simultaneously determine maps of the local film thickness, roughness and overlayer thickness as well as spectral dependencies of film optical constants determined for the sample as a whole. The roughness of the film upper boundary is modelled using scalar diffraction theory (SDT), for which an improved calculation method is developed to process the large quantities of experimental data produced by ISR efficiently. This method avoids expensive operations by expressing the series obtained from SDT using a double recurrence relation and it is shown that it essentially eliminates the necessity for any speed-precision trade-offs in the SDT calculations.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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