Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F14%3A00073332" target="_blank" >RIV/00216224:14740/14:00073332 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26210/14:PU110145

Result on the web

<a href="http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-53-25-5606" target="_blank" >http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-53-25-5606</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/AO.53.005606" target="_blank" >10.1364/AO.53.005606</a>

Result language

angličtina

Original language name

Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films

Original language description

Epitaxial ZnSe thin films exhibiting two important defects, i.e., boundary roughness and thickness nonuniformity, prepared on GaAs substrates, are optically characterized using a combination of variable-angle spectroscopic ellipsometry, spectroscopic near-normal reflectometry, and imaging spectroscopic reflectometry (ISR). The influence of boundary roughness is incorporated into optical quantity formulas by the Rayleigh-Rice theory. Thickness nonuniformity is included using averaging of the unnormalizedMueller matrices. The dispersion model of the optical constants of the ZnSe films is based on parametrization of the joint density of electronic states. Very thin overlayers represented by thin films with identically rough boundaries are taken into account on the upper boundaries of the ZnSe films. Standard optical techniques are used to determine the spectral dependencies of the optical constants of the ZnSe films, together with the parameters of roughness and thickness nonuniformity.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Applied Optics

ISSN

1559-128X

e-ISSN

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Volume of the periodical

53

Issue of the periodical within the volume

25

Country of publishing house

US - UNITED STATES

Number of pages

9

Pages from-to

5606-5614

UT code for WoS article

000341644300005

EID of the result in the Scopus database

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