Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057671" target="_blank" >RIV/00216224:14310/12:00057671 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment
Original language description
Two sets of nc-TiC/a-C:H coatings with varying chemical composition were prepared using a hybrid PVD-PECVD deposition process combining sputtering of titanium target in argon/acetylene. The range of chemical compositions was chosen appropriately to optimize the hardness of the coatings ? from 30at. % to 70 at. % Ti. The main goal of this contribution is focused on comparison of structure, chemical composition, and mechanical properties of the coatings prepared at different ion bombardment conditions. Time evolution of the deposition process is also taken into account.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů