Evolution of discharge current in high power impulse magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00066351" target="_blank" >RIV/00216224:14310/13:00066351 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Evolution of discharge current in high power impulse magnetron sputtering

Original language description

High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage andthe discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

PAPN 2013: Book of extended abstracts

ISBN

9788073729882

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

17-18

Publisher name

Technical University of Liberec

Place of publication

Liberec

Event location

Liberec

Event date

Jan 1, 2013

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

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